Funder
Deutsche Forschungsgemeinschaft
Publisher
Springer Science and Business Media LLC
Subject
Biochemistry,Biophysics,Biotechnology
Cited by
6 articles.
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1. UV-LED-based projection lithography for rapid high-resolution micro- and nanostructuring;Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX;2023-10-03
2. Optical and Plasmonic Devices Realized by UV-LED-Based Projection Photolithography;2023 Opto-Electronics and Communications Conference (OECC);2023-07-02
3. Sub-100 nm feature sizes realized by cost-effective microscope projection photolithography;Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI;2023-03-15
4. Integration of UV-nanoimprint lithography with two-photon polymerization for scalable production;Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI;2023-03-15
5. Disruptive Impact of Digitalisation on Optical Technologies;2020 22nd International Conference on Transparent Optical Networks (ICTON);2020-07