Zone melting recrystallization of polysilicon by a focused-lamp with unsymmetric trapezoidal power distribution-Reference-Cited by-同舟云学术

Zone melting recrystallization of polysilicon by a focused-lamp with unsymmetric trapezoidal power distribution

Published:1991-03 Issue:3 Volume:20 Page:231-235
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:JEM

Author:

Choi Jin-Ho,Song Ho-Jun,Kim Choong-Ki

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/BF02651898.pdf

Reference12 articles.

1. Michael P. Brassington, Alan G. Lewis and Susan L. Partridge, IEEE Trans. Electron Devices32, 1858 (1985).

2. Makoto Toshimi, Hiroaki Hazama, Minoru Takahashi, Shig- eru Kambayashi, Tetsunori Wada, Kouichi Kato and Hiro- yuki Tango, IEEE Trans. Electron Devices36, 493 (1986).

3. Jean-Pierre Colinge, Technical Digest IEDM, 817 (1989).

4. M. W. Geis, Henry I. Smith and C. K. Chen, Appl. Phys. Lett.60, 1152 (1986).

5. J. C. C. Fan, B. Y. Tsaur and M. W. Geis, J. Cryst. Growth.63, 453 (1983).

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