Micro-relay Technologies
Author:
Kam Hei,Chen Fred
Publisher
Springer New York
Reference14 articles.
1. R. Nathanael, V. Pott, H. Kam, J. Jeon, T.-J. King Liu, 4-terminal relay technology for complementary logic, in IEDM Tech. Dig., Dec. 2009, pp. 223–226. 2. H. Kam, V. Pott, R. Nathanael, J. Jeon, E. Alon, T.-J. King Liu, Design and reliability of a MEM relay technology for zero-standby-power digital logic applications, in IEDM Tech. Dig., Dec. 2009, pp. 809–812. 3. R. Parsa, W.S. Lee, M. Shavezipur, J. Provine, R. Maboudian, S. Mitra, H.-S.P. Wong, R.T. Howe, Laterally actuated platinum-coated polysilicon nanoelectromechanical (NEM) relays. IEEE J. Microelectromech. Syst. 22(3), 768–778 (2013). 11 pp 4. X.L. Feng, M.H. Matheny, C.A. Zorman, M. Mehregany, M.L. Roukes, Low voltage nanoelectromechanical switches based on silicon carbide nanowires. Nano Lett. 10, 2891–2896 (2010) 5. D.A. Czaplewski, G.A. Patrizi, G.M. Kraus, J.R. Wendt, C.D. Nordquist, S.L. Wolfley, M.S. Baker, M.P. de Boer, Nanoelectromechanical switch for integration with CMOS logic. J. Micromech. Microeng. 19(8), 085003 (2009)
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