Author:
Evdokimov I. N.,Fischer G.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference18 articles.
1. G. Dearnaley, J. H. Freeman, R. S. Nelson and J. Stephen, ?Ion implantation? (North Holland Publishing Co., Amsterdam, 1973).
2. D.W. Palmer, ?From idea to application? (International Atomic Energy Agency, Vienna, 1978) p. 215.
3. R. S. Nelson, Rad. Effects 2 (1969) 47.
4. R. Kelly and J. B. Sanders, Surf. Sci. 57 (1976) 143.
5. H. Nishi, T. Sakuray and T. Furuya, ?Ion implantation in Semiconductors?, edited by S. Namba (Plenum, New York, 1975) p. 347.
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