Planar Magnetron with Heated Boron Target for In Situ Investigation of Boron Film Deposition
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Physics and Astronomy
Link
https://link.springer.com/content/pdf/10.1007/s11182-023-03050-8.pdf
Reference11 articles.
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4. B. Sarma, N. Tikekar, and K. S. Ravi Chandran, Ceram. Int., 38, 6795 (2012); https://doi.org/10.1016/j.ceramint.2012.05.077.
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