1. International Technology Roadmap for Semiconductors, 2003 Edition, Front End Processes (Semiconductor Industry Association, San Jose, 2003), pp. 2, 23–33. Available on-line at http://public.itrs.net/Files/2003ITRS/Home2003.htm
2. The National Technology Roadmap for Semiconductors (Semiconductor Industry Association, San Jose, CA, 1997), p. 72.
3. A.I. Kingon, J-P. Maria and S.K. Streiffer, Nature 406, 1032 (2000).
4. G.D. Wilk, R.M. Wallace and J.M. Anthony, J. Appl. Phys. 89, 5243 (2001).
5. S. Zaima, T. Furuta, Y. Yasuda and M. Iida, J. Electrochem. Soc. 137, 1297 (1990).