Optically interrogated MEMS pressure sensor array

Author:

Prochazka Lukas,Meier Alexander H.,Viggiani Antonio,Roesgen Thomas

Publisher

Springer Science and Business Media LLC

Subject

Fluid Flow and Transfer Processes,General Physics and Astronomy,Mechanics of Materials,Computational Mechanics

Reference30 articles.

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3. Beltman WM, Van der Hoogt PJM, Spiering RMEJ, Tijdeman H (1998) Implementation and experimental validation of a new viscothermal acoustic finite element for Acousto-Elastic problems. J Sound Vib 216(1):159–185

4. Bennet JM, Mattsson L (1989) Introduction to surface roughness and scattering. Opt Soc Am. ISBN 1-55752-108-5

5. Blevins DB (2001) Formulas for natural frequency and mode shape. Krieger, NY

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