On the design of the latch mechanism for wafer containers in a SMIF environment-Reference-Cited by-同舟云学术

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On the design of the latch mechanism for wafer containers in a SMIF environment

Published:2006-12 Issue:12 Volume:20 Page:2025-2033
ISSN:1738-494X
Container-title:Journal of Mechanical Science and Technology
language:en
Short-container-title:J Mech Sci Technol

Author:

Lee Jyh-Jone,Chen Dar-Zen,Pai Wei-Ming,Wu Tzong-Ming

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials

Link

http://link.springer.com/content/pdf/10.1007/BF02916319.pdf

Reference28 articles.

1. Bonora, A. C. and Oen, J. T., 1996, “Direct Loadlock Interface,”United States Patent, No. 5, 586, 585.

2. Bonora, A. C. and Rosenquist, F. T., 1991, “Sealable Transportable Container Having Improved Latch Mechanism,”United States Patent, No. 4, 995, 430.

3. Bonora, A. C., Rosenquist, F. T. and Jain, S., Davis, M. R., 1998, “Sealable, Transportable Container Having a Breather Assembly,”United States Patent, No. 5,740,845.

4. Book of SEMI standards, SEMI E19-0697.

5. Book of SEMI standards, SEMI E62-0999.

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1. Type synthesis of metamorphic and axisymmetric parallel mechanisms using singularity for deployment and latch;Mechanism and Machine Theory;2023-11

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