Study on the Influence of the Pulling Rate on the Axial and Radial Uniformity of Gallium in Czochralski Monocrystalline Silicon Crystal
Author:
Funder
Shaoyuan Li;Wenhui Ma.
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s12633-023-02495-3.pdf
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