Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Reference47 articles.
1. Duwel A, Candler RN, Kenny TW, Varghese M (2006) Engineering MEMS resonators with low thermoelastic damping. J. Microelectromech. Syst. 15(6):1437–1445
2. Guo F, Rogerson G (2003) Thermoelastic coupling effect on a micro-machined beam resonator. Mech. Res. Commun. 30(6):513–518
3. Harris CM, Piersol AG (2002) Harris' shock and vibration handbook, vol 5. McGraw-Hill, New York
4. Koyama, T., Bindel, D. S., He, W., Quévy, E. P., Govindjee, S., Demmel, J. W., Howe, R. T. Simulation tools for damping in high frequency resonators. In: SENSORS, 2005 IEEE, 2005. IEEE, p 4 pp.
5. Zener C (1937) Internal friction in solids. I. Theory of internal friction in reeds. Phys. Rev. 52(3):230
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献