Thermally Stimulated Transformation of Oxygen Atoms Between Phase States in a Silicon Single Crystal

Author:

Kalanov M. U.,Sadikov I. I.,Khugaev A. V.,Malikov Sh. R.,Saidov A. S.,Usmonov Sh. N.,Saparov D. V.

Publisher

Springer Science and Business Media LLC

Reference27 articles.

1. Silicon Nanocrystals: Fundamentals, Synthesis and applications / Eds. L. Pavesi, R. Turan. Wienheim: Wiley – VCH, 2010, p 648

2. Gerasimenko NN, Yu N (2006) Parkhomenko. Silicon is a nanoelectronics material. – M.: Tekhnosphere, p 352

3. Hideki T (2004) Present status and prospect of si wafer for ultra large scale integration. Japan J Appl Phys 43(7A):4055–4067

4. Zulehner W (1983) Czochralski Grown of Silicon. J Cryst Growth 65(1–3):189–213

5. Babich VM, Bletskan NI, Wenger EF (1997) Oxygen in silicon single crystals. Kiev “Interpres LTD”, 7; 16; 27; 31; 33; 90; 97–98

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