Impact of Hydrogen Passivation on Electrical Properties of Polysilicon Thin Films
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Link
http://link.springer.com/article/10.1007/s12633-017-9746-3/fulltext.html
Reference16 articles.
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4. Petinot F, Plais F, Mencaraglia D, Legagneux P, Reita C, Huet O, Pribat D (1998) Defects in solid phase and laser crystallised polysilicon thin film transistors. J Non-Cryst Solids 227–230:1207–1212
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