Impact of elevated temperature over different properties of CVD SiCN coating developed in Nitrogen gas atmosphere
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s12633-021-01631-1.pdf
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3. Ctvrtlik R, Al-Haik MS, Kulikovsky V (2015) Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures. J Mater Sci. https://doi.org/10.1007/s10853-014-8715-0
4. Badzian A, Badzian T, Drawl WD, Roy R (1998) Silicon carbonitride: a rival to cubic boron nitride. Diam Relat Mater. https://doi.org/10.1016/S0925-9635(98)00228-3
5. An L, Riedel R, Konetschny C, Kleebe HJ, Raj R (1998) Newtonian viscosity of amorphous silicon carbonitride at high temperature. J Am Ceram Soc. https://doi.org/10.1111/j.1151-2916.1998.tb02489.x
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