Stress Engineering of a Window Porous Silicon Layer based on Pseudo Substrate Suitable for III-V Monolithic Integration
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s12633-023-02486-4.pdf
Reference29 articles.
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3. Knese K, Armbruster S, Weber H, Fischer M, Benzel H, Metz M, Seidel H (2009) Novel Technology for Capacitive Pressure Sensors with Monocrystalline Silicon Membranes, in: 2009 IEEE 22nd Int. Conf. Micro Electro Mech. Syst. pp. 697–700. https://doi.org/10.1109/MEMSYS.2009.4805478
4. Al-Jumaili BEB, Al-Jumaili BEB, Talib ZA (2016) Photoelectric properties of Metal-Semiconductor-Metal Photodetector based on Porous Silicon. J. Solid St. Sci. & Technol. Letters. 17:79–82
5. Al-Jumaili B, Talib ZA, Ramizy A, Aljameel A, Baqiah H, Ahmed NM, Paiman SB, Liew JYC, Lee HK (2021) Formation and photoluminescence properties OF porous silicon/copper oxide nanocomposites fabricated via electrochemical deposition technique for photodetector application. Dig J Nanomater Biostruct. 16:297–310
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