Dry Etching Fabrication for Ring Vibration Resonator Based on Quartz-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Dry Etching Fabrication for Ring Vibration Resonator Based on Quartz

Published:2023-01-16 Issue:8 Volume:15 Page:3657-3662
ISSN:1876-990X
Container-title:Silicon
language:en
Short-container-title:Silicon

Author:

Zhuo Ming,Tan Xiaoyu,Li Qingsong,Lu Kuo,Xiao Dingbang,Lin Yuanwei

Funder

Excellent Youth Foundation of Hunan

National Key Research and Development Program of China

National Natural Science Foundation of China

Publisher

Springer Science and Business Media LLC

Subject

Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s12633-022-02234-0.pdf

Reference28 articles.

1. Sanders GA, Sanders SJ, Strandjord LK, Qiu T, Wu J, Smiciklas M, Mead D, Mosor S, Arrizon A, Ho W, Salit M (2016) Fiber optic gyro development at Honeywell. Proc of SPIE 9852:985207

2. Trusov AA, Atikyan G, Rozelle DM, Meyer AD, Zotov SA, Simon BR, Shkel AM (2014) Flatis not dead: current and future performance of Si-MEMS Quad Mass Gyro (QMG) system. 2014 IEEE/ION Position, Location and Navigation Symposium-PLANS 2014

3. Liu K, Zhang W, Chen W, Li K, Dai F, Cui F, Wu X, Ma G, Xiao Q (2009) The development of micro-gyroscope technology. J Micromech Microeng 19:113001

4. Ciminelli C, Dell’Olio F, Armenise MN, Soares FM, Passenberg W (2013) High performance InP ring resonator for new generation monolithically integrated optical gyroscopes. Opt Express 21(1):556–564

5. Pan Z, Zhang C, Xie C, Zheng Y, Li H, Tang J, Liu J (2018) Resonator integrated optic gyro based on multilevel laser frequency lock-in technique. Chin Opt Lett 16(4):040601

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP