Author:
Lin M.-T.,Tong C.-J.,Shiu K.-S.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Aerospace Engineering
Reference53 articles.
1. Miller SL, Rodgers MS, LaVigne G, Sniegowski JJ, Clews P, Tanner DM, Peterson KA (1998) Failure modes in surface micromachined MicroElectroMechanical actuators. Proceedings of the 36th Annual International Reliability Physics Symposium, pp. 17–25
2. Barbosa N III, El-Deiry P, Vinci RP (2003) Monotonic testing and tension–tension fatigue testing of free-standing Al microtensile beams. Proceedings of the Materials Research Society Symposium on Thin Films—Stresses and Mechanical Properties X, pp. 423–428
3. Vinci RP, Cornella G, Bravman JC (1999) Anelastic Effects in Freestanding Al Thin Films. Proceedings of the 5th International Workshop on Stress Induced Phenomena in Metallization, June, pp. 240–248
4. Lee HJ, Cornella G, Bravman JC (2000) Stress relaxation of free-standing aluminum beams for microelectromechanical systems applications. Appl Phys Lett 7623:3415–3417. doi: 10.1063/1.126664
5. Nix WD (1989) Mechanical properties of tin films. Metall Trans A 20A:2217–2245
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