Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Applied Mathematics,Artificial Intelligence,Computational Theory and Mathematics,Computer Networks and Communications,Computer Science Applications,Information Systems
Reference21 articles.
1. Tilmans H, Am C, Raedt WD, Beyne E (2003) MEMS for wireless communications: from RF-MEMS components to RF-MEMS SiP. Micromech Microeng 13:139–163
2. Brown ER (1998) RF-MEMS switches for reconfigurable integrated circuits. IEEE Trans Microw theory Tech 46:1868–1880
3. Zhu J et al (2020) Development trends and perspectives of future sensors and MEMS/NEM. Micromachines 11:1–30
4. Cui J, Li Y, Yang Y, Shi P, Wang B, Wang S, Zhang G, Zhang W (2022) Design and optimization of MEMS heart sound sensor based on bionic structure. Sens Actuators, A 333:113188–131198
5. Dorin P (2006) MEMS in medicine and biology. IEEE Eng Med Biol Mag 5:19–28
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