Relationship between dynamic characteristics of air film of aerostatic spindle and mid-frequency of surface topography

Author:

Chen Dong-JuORCID,Li Shu-Pei,Zhang Xuan,Fan Jin-Wei

Funder

national natural science foundation of china

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Polymers and Plastics,Mechanical Engineering,Mechanics of Materials

Reference27 articles.

1. Chen D, Huo C, Cui X et al (2018) Investigation the gas film in micro scale induced error on the performance of the aerostatic spindle in ultra-precision machining. Mech Syst Signal Pr 105:488–501

2. Cui H, Lei D, Zhang X et al (2019) Measurement and analysis of the radial motion error of aerostatic ultra-precision spindle. Measurement 137:624–635

3. Cai T, Zhang M, Zhu Y et al (2011) Error modeling and analysis of an ultra-precision stage with an aerostatic bearing. J Tsinghua Univ (Sci & Tech) 51(6):857–861

4. Zhang SJ, To S, Wang HT (2013) A theoretical and experimental investigation into five-DOF dynamic characteristics of an aerostatic bearing spindle in ultra-precision diamond turning. Int J Mach Tool Manu 71(8):1–10

5. Chen D, Cui X, Pan R et al (2018) A prediction model of the surface topography due to the unbalance of the spindle system in ultra-precision fly-cutting machining. Adv Mech Eng 10(1):1–11

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Effect of aerostatic spindle dynamic characteristics on the medium frequency waviness error of silicon wafer surface;The International Journal of Advanced Manufacturing Technology;2023-12-19

2. Integrated design and analysis of a high-precision aerostatic spindle for internal grinding machines and its implementation perspectives;Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology;2023-07-02

3. Optimal design of the dynamic performance of the ultra-precision fly cutting machine tool;The International Journal of Advanced Manufacturing Technology;2022-11-25

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