Integrated color defect detection method for polysilicon wafers using machine vision-Reference-Cited by-同舟云学术

Integrated color defect detection method for polysilicon wafers using machine vision

Published:2014-12 Issue:4 Volume:2 Page:318-326
ISSN:2095-3127
Container-title:Advances in Manufacturing
language:en
Short-container-title:Adv. Manuf.

Author:

Zhang Zai-Fang,Liu Yuan,Wu Xiao-Song,Kan Shu-Lin

Publisher

Springer Science and Business Media LLC

Subject

Industrial and Manufacturing Engineering,Polymers and Plastics,Mechanical Engineering,Mechanics of Materials

Link

http://link.springer.com/content/pdf/10.1007/s40436-014-0095-9.pdf

Reference16 articles.

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3. Yoo JS, So JH, Yu GJ et al (2011) Study on hydrogenated silicon nitride for application of high efficiency crystalline silicon solar cells. Solar Energy Mater Solar Cells 95(1):7–10

4. Otani T, Hirata M (2003) High rate deposition of silicon nitride films by APCVD. Thin Solid Films 442:44–47

5. Schlemm H, Mai A, Roth S et al (2003) Industrial large scale silicon nitride deposition on photovoltaic cells with linear microwave plasma sources. Surf Coat Technol 208:174–175

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