Electrochemical performance of thermally-grown SiO2 as diffusion barrier layer for integrated lithium-ion batteries
Author:
Publisher
Springer Science and Business Media LLC
Subject
Energy Engineering and Power Technology
Link
http://link.springer.com/article/10.1007/s11708-018-0556-0/fulltext.html
Reference22 articles.
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4. Baggetto L, Oudenhoven J F M, Van Dongen T, Klootwijk J H, Mulder M, Niessen R A H, de CroonMH J M, Notten P H L. On the electrochemistry of an anode stack for all-solid-state 3D-integrated batteries. Journal of Power Sources, 2009, 189(1): 402–410
5. Knoops H C M, Baggetto L, Langereis E, van de Sanden M C M, Klootwijk J H, Roozeboom F, Niessen R A H, Notten P H L, Kessels WMM. Deposition of TiN and TaN by remote plasma ALD for Cu and Li diffusion barrier applications. Journal of the Electrochemical Society, 2008, 155(12): G287–G294
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