Author:
Vaz A. R.,da Silva M. M.,Leon J.,Moshkalev S. A.,Swart J. W.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference18 articles.
1. Kempshall BW, Schwarz SM, Prenitzer BI, Giannuzzi LA, Irwin RB, Stevie FA (2001) J Vac Sci Technol B 19(3):749
2. Anazawa N, Aihara R, Okunuki M, Shimizu R (1982) Scanning Electron Microscopy IV, AMF O’Hare, Chicago, p 1443
3. Orloff J, Sudraud P (1985) Microelectr Eng 3:161
4. Kato T, Morimoto H, Saitoh K, Nakata H (1985) J Vac Sci Technol B 3(1):50
5. Nagase T, Gamo K, Kubota T, Mashiko S (2005) Microelectr Eng 78–79:253
Cited by
19 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献