Thickness-induced crystallization of amorphous In2O3 films: influence of the film deposition rate
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
http://link.springer.com/content/pdf/10.1007/s10853-008-3172-2.pdf
Reference12 articles.
1. Muranaka S, Bando Y, Takada T (1987) Thin Solid Films 151:355
2. Wulf H, Quaas M, Steffen H, Hippler H (2000) Thin Solid Films 377:418
3. Rogozin A, Shevchenko N, Vinnichenko M, Prokert F, Cantelli V, Kolitsch A, Moller W (2004) Appl Phys Lett 85:212
4. Adurodija FO, Semple L, Bruning R (2006) J Mater Sci 41:7096. doi: https://doi.org/10.1007/s10853-006-0038-3
5. Muranaka S (1991) Jpn J Appl Phys 30:L2062
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