Iridium oxide top electrodes for piezo- and pyroelectric performance enhancements in lead zirconate titanate thin-film devices-Reference-Cited by-同舟云学术

Iridium oxide top electrodes for piezo- and pyroelectric performance enhancements in lead zirconate titanate thin-film devices

Published:2020-05-22 Issue:24 Volume:55 Page:10351-10363
ISSN:0022-2461
Container-title:Journal of Materials Science
language:en
Short-container-title:J Mater Sci

Author:

Rivas Manuel,Rudy Ryan Q.,Sanchez Bradley,Graziano Milena B.,Fox Glen R.,Sunal Paul,Nataraj Latha^ORCID,Sandoz-Rosado Emil,Leff Asher C.,Huey Bryan D.,Polcawich Ronald G.,Hanrahan Brendan^ORCID

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://link.springer.com/content/pdf/10.1007/s10853-020-04766-5.pdf

Reference37 articles.

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2. Qiu P, Ding A, He X, Luo W (2000) Influence of top electrode of PZT capacitor on ferroelectric properties. In: 4th International conference on thin film physics and applications. SPIE, p 4

3. Lee JJ, Thio CL, Desu SB (1995) Electrode contacts on ferroelectric Pb(ZrxTi1−x)O3 and SrBi2Ta2O9 thin films and their influence on fatigue properties. J Appl Phys 78(8):5073–5078. https://doi.org/10.1063/1.359737

4. Pintilie L, Pasuk I, Negrea R, Filip LD, Pintilie I (2012) The effect of the top electrode interface on the hysteretic behavior of epitaxial ferroelectric Pb(Zr, Ti)O3 thin films with bottom SrRuO3 electrode. J Appl Phys 112(6):064116. https://doi.org/10.1063/1.4754318

5. Potrepka DM, Rivas M, Yu H, Aindow M, Fox GR, Polcawich RG (2018) Effect of IrO2/Pt, IrO2, and Pt bottom electrodes on the structure and electrical properties of PZT based piezoelectric microelectromechanical system devices. J Mater Sci Mater Electron 29(13):11367–11377. https://doi.org/10.1007/s10854-018-9224-8

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