Structural and dielectric properties of ion beam deposited titanium oxynitride thin films
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
http://link.springer.com/article/10.1007/s10853-018-2923-y/fulltext.html
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5. Boltasseva A, Naik GV, Kim J (2011) Oxides and nitrides as alternative plasmonic materials in the optical range. Opt Mater Express 1:1090–1099
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