Theoretical study on tin oxide surface chemistry mechanism and thermodynamic properties for atomic layer deposition equipment optimization
Author:
Funder
National Key Research and Development Program of China
National Natural Science Foundation of China
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://link.springer.com/content/pdf/10.1007/s10853-023-09007-z.pdf
Reference59 articles.
1. Fu QM, Peng JL, Yao ZC, Zhao HY, Ma ZB, Tao H, Tu YF, Tian Y et al (2020) Highly sensitive ultraviolet photodetectors based on ZnO/SnO2 core-shell nanorod arrays. Appl Sur Sci 527:146923. https://doi.org/10.1016/j.apsusc.2020.146923
2. Martinez-Gazoni RF, Allen MW, Reeves RJ (2018) Conductivity and transparency limits of Sb-doped SnO2 grown by molecular beam epitaxy. Phys Rev B 98:155308. https://doi.org/10.1103/PhysRevB.98.155308
3. Giraldi TR, Ribeiro C, Escote MT, Conti TG, Chiquito AJ, Leite ER, Longo E, Varela JA (2006) Deposition of controlled thickness ultrathin SnO2: Sb films by spin-coating. J Nanosci Nanotechnol 6:3849–3853. https://doi.org/10.1166/jnn.2006610
4. Dalapati GK, Sharma H, Guchhait A, Chakrabarty N, Bamola P, Liu Q, Saianand G, Krishna AMS et al (2021) Tin oxide for optoelectronic, photovoltaic and energy storage devices: a review. J Mater Chem A 9:16621–16684. https://doi.org/10.1039/D1TA01291F
5. Liu J, Zhang H, Li Y, Shen H, Ding Y, Su N, Shao L, Jin G et al (2021) Enhanced Vis-NIR light absorption and thickness effect of Mo-modified SnO2 thin films: a first principle calculation study. Results Phys 23:103997. https://doi.org/10.1016/j.rinp.2021.103997
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