On the migration of defects and impurities in microelectromechanical systems subject to a large number of light pulses
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Published:2001-10
Issue:4
Volume:73
Page:425-427
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ISSN:0947-8396
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Container-title:Applied Physics A
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language:en
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Short-container-title:Appl Phys A
Author:
Wautelet M.,Dauchot J.P.,Hecq M.
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry