Author:
Li B.,Twesten I.,Schwentner N.
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science
Reference46 articles.
1. N.G. Einspruch, D.M. Brown: Plasma Processing for VLSI; VLSI Electronics Microstructure Sci., Vol. 8 (Academic, New York 1984)
2. M. Hirose: Photon, Beam and Plasma Assisted Processing, ed. by I.W. Boyd, E.F. Krimmel (Elsevier, New York 1989) p. xvii
3. Springer Series Mater. Sci.;D. Bäuerle,1986
4. T.J. Chuang: J. Vac. Sci. Technol. 21, 798 (1982)
5. W. Sesselmann, T.J. Chuang: J. Vac. Sci. Technol. B 3, 1507 (1985)
Cited by
19 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献