Development of Highly Sensitive and Stable SAW-based Temperature Sensor Array and its Interface Electronics for Realtime Monitoring of Wafer Surface Temperature in Plasma Chamber-Reference-Cited by-同舟云学术

Development of Highly Sensitive and Stable SAW-based Temperature Sensor Array and its Interface Electronics for Realtime Monitoring of Wafer Surface Temperature in Plasma Chamber

Published:2023-12-16 Issue: Volume: Page:
ISSN:1975-0102
Container-title:Journal of Electrical Engineering & Technology
language:en
Short-container-title:J. Electr. Eng. Technol.

Author:

Lee Hyunho,Kim Sihyeok,Jung Sangwon,Lee Keekeun^ORCID

Funder

KEPCO Research Institute

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering

Link

https://link.springer.com/content/pdf/10.1007/s42835-023-01757-9.pdf

Reference22 articles.

1. Kim JH, Koo Y, Song W, Hong SJ (2022) On-wafer temperature monitoring sensor for condition monitoring of repaired electrostatic chuck. Electronics 11(6):880

2. Nam VB, Lee D (2021) Evaluation of Ni-based flexible resistance temperature detectors fabricated by laser digital pattering. Nanomaterials 11(3):576

3. Heichal Y, Chandra S, Bordatchev E (2005) A fast-response thin film thermocouple to measure rapid surface temperature changes. Exp Thermal Fluid Sci 30(2):153–159

4. Suman S, Gaitan M, Joshi Y, Harman GG (2005) Wire-bonding process monitoring using thermopile temperature sensor. IEEE Trans Adv Packag 28(4):685–693

5. Song K, Zhao R, Wang ZL, Yang Y (2019) Conjuncted pyro-piezoelectric effect for self-powered simultaneous temperature and pressure sensing. Adv Mater 31(36):1902831

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