Author:
Lee Woo-Cheol,Kwon Min-Jun
Funder
Korea Electric Power Corporation
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering
Reference9 articles.
1. Somkhunthot W, Burinprakhon T, Thomas I, Seetawan T, Amornkitbamrung V (2007) Biopolar pulsed- DC power suplly for magnetron sputtering and thin films synthesis. Elektrica 9(2):20–26
2. Akiyama H et al (2007) Industrial applications of pulsed power technology. IEEE Trans Dielectr Electr Insul 14(5):1051–1064
3. Lundin D, Sarakinos K (2012) An introduction to thin film processing using highpower impulse magnetron sputtering. J Mater Res 27:780–792
4. Gudmundsson JT et al (2012) High power impulse magnetron sputtering discharge. J Vac Sci Technol A Vac Surf Films 30(3):030801
5. Belkind A, Freilich A, Lopez J, Zhao Z, Zhu W, Becker K (2005) Characterization of pulsed dc magnetron puttering plasmas. New J Phys 7(1):90