Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanics of Materials,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. M. Okada et al., J. Appl. Phys. 28, 1030–1034 (1989)
2. S. Hiboux, P. Muralt, T. Maeder, J. Mater. Res. 14, 4307–4318 (1999)
3. J. Zhang et al., Ultrasonics 39, 91–95 (2001)
4. R.J. Meyer Jr. et al., Sens. Actuators, A 87, 157–162 (2001)
5. N. Chomnawang, J.-B. Lee, On-chip 3D micro-inductor for high-frequency applications using deformation of sacrificial polymer (Department of Electrical and Computer Engineering, Louisiana State University, Baton Rouge)
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