Fabrication of PZT Composite Thick Films for High Frequency Membrane Resonators-Reference-Cited by-同舟云学术

Fabrication of PZT Composite Thick Films for High Frequency Membrane Resonators

Published:2004-07 Issue:1-3 Volume:13 Page:267-270
ISSN:1385-3449
Container-title:Journal of Electroceramics
language:en
Short-container-title:J Electroceram

Author:

Duval F. F. C.,Dorey R. A.,Wright R. W.,Huang Z.,Whatmore R. W.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanics of Materials,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s10832-004-5110-2.pdf

Reference7 articles.

1. G. Caliano, F. Galanello, A. Caronti, R. Carotenuto, and M. Pappalardo, Ultrasonics Symposium (IEEE, 2000), vol. 1, p. 963.

2. E. Cianci, V. Foglietti, G. Caliano, and M. Pappalardo, Microelectronic Engineering, 61/62, 1025 (2002)

3. Ferroperm?High Quality Piezoelectric Ceramic components for the electronics industry, http://www.ferroperm-piezo.com/ferroperm_material_data.xls

4. P.B. Kirby, Q.X. Su, E. Komuro, Q. Zhang, M. Imura, and R.W. Whatmore, PZT Thin Film Bulk Acoustic Wave Resonator and Filters, 2001 IEEE International Frequency Control Symposium and PDA Exhibition (IEEE, Seattle, WA, USA, 2001), p. 687.

5. F.F.C. Duval, R.A. Dorey, R.H. Haigh, and R.W. Whatmore, Stable Ti/O2/Pt Electrode Structure for Lead Containing Ferroelectric Thick Films on Silicon MEMS Structures, Thin Solid Films, 444, 235 (2003).

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication and analytical modeling of transverse mode piezoelectric energy harvesters;MRS Proceedings;2012

2. Modeling and finite element analysis of mechanical behavior of flexible MEMS components;Microsystem Technologies;2011-02-02

3. Novel patterning of composite thick film PZT;Journal of Electroceramics;2007-09-18