Micromachined piezoelectric structures for high-temperature sensors-Reference-Cited by-同舟云学术

Micromachined piezoelectric structures for high-temperature sensors

Published:2007-11-29 Issue:1-3 Volume:22 Page:180-184
ISSN:1385-3449
Container-title:Journal of Electroceramics
language:en
Short-container-title:J Electroceram

Author:

Sauerwald Jan,Schulz Michal,Richter Denny,Fritze Holger

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanics of Materials,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s10832-007-9363-4.pdf

Reference14 articles.

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3. K. Shimamura, H. Takeda, T. Kohno, T. Fukuda, J. Cryst. Growth 163, 388 (1996)

4. B. Chai, J.L. Lefaucheur, Y.Y. Ji, H. Qiu, Proceedings of the 1998 IEEE International Frequency Control Symposium, p. 748–760 (1998)

5. H. Fritze, M. Schulz, H. Seh, H.L. Tuller, Solid State Ionics 177, 2313 (2006)

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