Author:
Yang Shyh-Horng,Morris Steven J.,Lim David L.,Tasch Al F.,Simonton Robert B.,Kamenitsa Dennis,Magee Charles,Lux Gayle
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. W.L. Smith, A. Rosenwaig, D. Willenborg, J. Opsal and M.W. Taylor,Solid State Technol. 29, 85 (1986).
2. R.G. Wilson, F.A. Dtevie and C.W. Magee,Secondary Ion Mass Spectrometry, (New York: John Wiley & Sons, 1989).
3. W. Vandervorst, H.E. Maes and R.F. De Keersmaecker,J. Appl. Phys. 56, 1425 (1984).
4. J.J. Lee, J.E. Fulghum, G.E. McGuire, M.A. Ray, C.M. Osburn and R.W. Linton,J. Vac. Sci. Technol. A 8, 2287 (1990).
5. K. Wittmaack and W. Wach,Nucl. Instrum. Meth. 191, 327 (1981).
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