Epitaxial growth of SrRuO3 thin films by RF sputtering and study of surface morphology

Author:

Khan M. K. R.,Ito M.,Ishida M.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science

Reference21 articles.

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2. Eom C B, Van Dover R B, Phillips J M, et al. Fabrication and properties of epitaxial ferroelectric heterostructures with (SrRuO3) isotropic metallic oxide electrodes. Applied Physics Letters, 1993, 63(18): 2570–2572

3. Fukushima N, Abe K, Izuha M. Leakage degradation in BST dielectric capacitors with oxide and metal electrodes. In: Proceeding of Ferroelectric Thin Films VI, Materials Research Society, Pittsburg, 1997

4. Jones C W, Battle P D, Lightfoot P, et al. The structure of SrRuO3 by time-of-flight neutron powder diffraction. Acta Crystallographica, 1989, C45(3): 365–367

5. Randall J J, Ward R. The preparation of some ternary oxides of the platinum metals. Journal of the American Chemical Society, 1959, 81(11): 2629–2631

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