Pulsed operation of a liquid metal ion source

Author:

Kissel J.,Zscheeg H.,R�denauer F. G.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science

Reference10 articles.

1. J. Melngailis: J. Vac. Sci. Tech. B5, 469 (1987)

2. A. Benninghoven, F.G. Rüdenauer, H.W. Werner:Secondary Ion Mass Spectrometry (Wiley, New York 1987)

3. A. Wagner, T.M. Hall: J. Vac. Sci. Techn.16, 1871 (1979)

4. S.P. Thompson, P.D. Prewett: J. Phys. D17, 2305 (1984)

5. H. v. Rohden: Private communication (1987)

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