Laser-Based Structuring of Piezoceramics for Mobile Microrobots

Author:

Edeler Christoph,Jasper Daniel

Publisher

Springer Netherlands

Reference11 articles.

1. J. F. Ready and D. F. Farson, LIA Handbook of Laser Materials Processing. 12424 Research Parkway, Suite 125, Orlando, FL 32826: Laser Institute of America, Orlando, USA, 2001.

2. M. J. Jackson, Microfabrication and Nanomanufacturing. CRC Press, 2006.

3. S. Fatikow, Mikrorobotik und Mikrosystemtechnik. University of Oldenburg, Lecture notes, vol. 5, 2004.

4. J. A. McGeough, Micromachining of Engineering Materials. CRC Press, 2002.

5. D. W. Richerson, Modern Ceramic Engineering: Properties, Processing, and Use in Design. CRC Press, 2006.

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1. Development of a Software for Laser-Based Micromachining of Piezoceramic Microactuators;The AUN/SEED-Net Joint Regional Conference in Transportation, Energy, and Mechanical Manufacturing Engineering;2022

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3. Simulation and Measurements of Stick-Slip-Microdrives for Nanorobots;New Trends in Mechanism Science;2010

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