Author:
Paek M. C.,Im H. B.,Lee J. Y.
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Cited by
8 articles.
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1. Formation of Ultra-Shallow Junctions;Reference Module in Materials Science and Materials Engineering;2016
2. Ion implantation of boric molecules for silicon solar cells;Solar Energy Materials and Solar Cells;2015-11
3. (Invited) Defect Engineering at the Nanoscale: Challenges and Trends;ECS Transactions;2013-03-15
4. Formation of Ultra-Shallow Junctions;Comprehensive Semiconductor Science and Technology;2011
5. Fluorine implantation effect on boron diffusion in Si;Journal of Applied Physics;1999-01-15