Effect of Ink Molecular Weights and Annealing Conditions on Molecular Transfer Printing
Author:
Publisher
Springer Science and Business Media LLC
Subject
Polymers and Plastics,Organic Chemistry,General Chemical Engineering
Link
http://link.springer.com/article/10.1007/s10118-018-2056-4/fulltext.html
Reference37 articles.
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2. Li, W.; Mueller, M. Directed self-assembly of block copolymers by chemical or topographical guiding patterns: optimizing molecular architecture, thin-film properties, and kinetics. Prog. Polym. Sci. 2016, 54-55, 47–75.
3. Delgadillo, P. A. R.; Gronheid, R.; Thode, C. J.; Wu, H.; Cao, Y.; Neisser, M.; Somervell, M.; Nafus, K.; Nealey, P. F. Implementation of a chemo-epitaxy flow for directed self-assembly on 300-mm wafer processing equipment. J. Micro-nanolitho. Mems. Moems. 2012, 11(3), 031302
4. Mojarad, N.; Gobrecht, J.; Ekinci, Y. Interference lithography at euv and soft X-ray wavelengths: principles, methods, and applications. Microelectron. Eng. 2015, 143, 55–63.
5. Ji, S.; Liu, C. C.; Liu, G.; Nealey, P. F. Molecular transfer printing using block copolymers. ACS Nano 2010, 4(2), 599–609.
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