A new inorganic-organic polymer for the passivation of thin film capacitors

Author:

Popall Michael,Kappel J�rgen,Pilz Monika,Schulz Jochen,Feyder Gusty

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Condensed Matter Physics,Biomaterials,General Chemistry,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Levy, R.A., (Ed.): Microelectronic Materials and Processes, Kluwer Academic Publishers, Dordrecht 1989.

2. Goff, D.L., Yuan, E.L., Long, H., and Neuhaus, H.J., in: Polymeric Materials for Electronics Packaging and Interconnection; Lupinski, J.H., Moore, R.S., (Eds.); Am. Chem. Soc. Symp. Series Vol. 407, 93 (1989).

3. Goosey, M.T., (Ed): Plastics for electronics, Elsevier Applied Science Publishers, London 1985.

4. Popall, M. and Schulz, J., Proceedings ELMAT 91?Materials in Micro Electronics, Hieber, H., (Ed.), VDE-Verlag, Berlin, 1 (1991).

5. Popall, M., Kappel, J., Pilz, M., and Schulz, J., in: Proc. Eurogel 91, 121 (1992).

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