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Solid damping in micro electro mechanical systems

  • Published:2008-01-10 Issue:4 Volume:43 Page:419-428
  • ISSN:0025-6455
  • Container-title:Meccanica
  • language:en
  • Short-container-title:Meccanica

Author:

Ardito Raffaele,Comi Claudia,Corigliano Alberto,Frangi Attilio

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics

Reference21 articles.

1. Abdolvand R, Ho GK, Erbil A, Ayazi F (2003) Thermoelastic damping in trench-refilled polysilicon resonators. In: Proceedings of transducers ’03, p 324

2. Clough RW, Penzien J (1993) Dynamics of structures. McGraw-Hill, Singapore

3. Desoer CA, Kuh ES (1969) Basic circuit theory. McGraw-Hill, New York

4. Eringen AC (1972) Linear theory of nonlocal elasticity and dispersion of plane waves. Int J Eng Sci 10:425–435

5. Eringen AC (1987) Theory of nonlocal elasticity and some applications. Res Mech 21:313–342

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