Theoretical analysis and simulation of thermoelastic deformation of bimorph microbeams
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Engineering,General Materials Science
Link
http://link.springer.com/content/pdf/10.1007/s11431-013-5217-2.pdf
Reference21 articles.
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3. Lee S, Wallis T M. Asymmetric dielectric trilayer cantilever probe for calorimetric high-frequency field imaging. J Microelectromech Syst, 2007, 16: 78–86
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