A novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design-Reference-Cited by-同舟云学术

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A novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design

Published:2016-12-14 Issue:2 Volume:60 Page:317-324
ISSN:1674-7321
Container-title:Science China Technological Sciences
language:en
Short-container-title:Sci. China Technol. Sci.

Author:

He ChunHua,Zhao QianCheng,Huang QinWen,Lin LongTao,Yang ZhenChuan,Zhang DaCheng,Yan GuiZhen

Publisher

Springer Science and Business Media LLC

Subject

General Engineering,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/s11431-016-0504-7.pdf

Reference30 articles.

1. Zaman M F, Sharma A, Hao Z L, et al. A mode-matched silicon-yaw tuning-fork gyroscope with subdegree-per-hour Allan deviation bias instability. J Microelectromech Syst, 2008, 17: 1526–1536

2. Prikhodko I P, Zotov S A, Trusov A A, et al. Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-factor. In: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS). Beijing: IEEE, 2011. 2809–2812

3. He C H, Zhao Q C, Liu D C, et al. An automatic real-time mode-matching MEMS gyroscope with fuzzy and neural network control. In: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). IEEE, 2013. 54–57

4. Sonmezoglu S, Alper S E, Akin T. An automatically mode-matched MEMS gyroscope with 50 Hz bandwidth. In: 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS). Paris: IEEE, 2012. 523–526

5. Sung W T, Sung S, Lee J G, et al. Design and performance test of a MEMS vibratory gyroscope with a novel AGC force rebalance control. J Micromech Microeng, 2007, 17: 1939–1948

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and Experiment for Dual-Mass MEMS Gyroscope Sensing Closed-Loop System;IEEE Access;2020

2. A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes;IEEE Access;2020

3. Design and Experiment of Dual-Mass MEMS Gyroscope Sense Closed System Based on Bipole Compensation Method;IEEE Access;2019

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