A model calculation of the neutral molecule emission by sputtering processes
Author:
Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://link.springer.com/content/pdf/10.1007/BF01325457.pdf
Reference25 articles.
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3. Bradley, R.C.: J. Appl. Phys.33, 880 (1962) Comas, J., Cooper, C.B.: J. Appl. Phys.38, 2956 (1967) Woodyard, J.R., Cooper, C.B.: J. Appl. Phys.35, 1107 (1964) Coburn, J.W., Kay, E.: Appl. Phys. Lett.19, 350 (1971)
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