The Role of Graphene Defects in Graphene-Coated Copper Oxidation Behavior
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Arts and Humanities
Link
https://link.springer.com/content/pdf/10.1007/s12666-023-03122-w.pdf
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4. Lee H C, Jo M, Lim H, Yoo M S, Lee E, Nguyen N N, Han S Y, and Cho K, Toward near-bulk resistivity of Cu for next-generation nano-interconnects: Graphene-coated Cu. Carbon N. Y. 149 (2019) 656–663. https://doi.org/10.1016/j.carbon.2019.04.101
5. Y.-L. Cheng, C.-Y. Lee, Y.-L. Huang, Copper Metal for Semiconductor Interconnects, in: Noble Precious Met. - Prop. Nanoscale Eff. Appl., 2018. https://doi.org/10.5772/intechopen.72396.
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