Zur Theorie der Kathodenzerst�ubung
Author:
Publisher
Springer Science and Business Media LLC
Subject
Nuclear and High Energy Physics
Link
http://link.springer.com/article/10.1007/BF01339785/fulltext.html
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Production, thermalization, and transport of sputtered lithium atoms across a glow discharge plasma, studied by concentration modulated absorption spectroscopy;Journal of Applied Physics;1998-08
2. Sputtering in a glow discharge ion source-pressure dependence: theory and experiment;Journal of Physics D: Applied Physics;1994-11-14
3. Cathodic bombardment and sputtering in the 0.5-4.0 torr pressure region of a glow-discharge ion source;Rapid Communications in Mass Spectrometry;1994-02
4. The application of nonequilibrium surface ionization to the emission of secondary ions;International Journal of Mass Spectrometry and Ion Physics;1973-08
5. Impact Evaporation and Thin Film Growth in a Glow Discharge;Advances in Electronics and Electron Physics;1963
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