Determination of particle-bound trace metals in high purity hydrogen chloride

Author:

Faix Werner G.,Schramm Wolfgang,Vix Francis,Weichbrodt G.,Henkelmann Richard

Publisher

Springer Science and Business Media LLC

Subject

Clinical Biochemistry,General Materials Science,General Medicine,Analytical Chemistry

Reference39 articles.

1. Mitchell JW (1982) Pure Appl Chem 54:819–834

2. Mitchell JW (1985) Solid State Technol 28:131–137

3. Bunyard GB, Lin K, Pecsar RE (1983) Semiconductor International, pp 101–104, June 1983

4. Francis T (1984) Particulates in electronic gases. Gas purity handling, Paper No. 3. Air Products and Chemicals, Inc.

5. Boyd H (1984) Non-contaminating gas containment, control and delivery systems for VLSI-class wafer fabrication. Liquid Air Corp

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