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2. A. Burenkov, J. Lorenz, Corner effect in double and triple gate FinFETs, in: Proc. ESSDERC 2003. Eds.: J. Franca and P. Freitas, Estoril, Portugal, 2003, p. 135.
3. see
http://www.iis-b.fhg.de/en/arb_geb/magic_feat.html
4. see
http://www.ise.com
5. E. Bär, J. Lorenz, H. Ryssel, Three-dimensional simulation of layer deposition, Microelectronics Journal, 29 (1998) 799.