Process Flow Representation within the VISTA Framework

Author:

Pichler Ch.,Selberherr S.

Publisher

Springer Vienna

Reference8 articles.

1. D. S. Boning, Semiconductor Process Design: Representations, Tools, and Methodologies, PhD Thesis, Massachusetts Institute of Technology, January 1991.

2. A. S. Wong, Technology Computer-Aided Design Frameworks and the PROSE Implementation, PhD Thesis, University of California, Berkeley, 1992.

3. E. W. Scheckler et al., A Utility-Based Integrated System for Process Simulation, IEEE Trans. Comp. Aided Design, Vol. 11, No. 7, pp. 911–920, 1992.

4. H. Pimingstorfer et al., A Technology CAD Shell, SISDEP IV, pp. 409–416, 1991.

5. S. Halama et al., Consistent User Interface and Task Level Architecture of a TCAD System, NUPAD IV, pp. 237–242, 1992.

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1. TCAD Optimization Based on Task-Level Framework Services;Simulation of Semiconductor Devices and Processes;1995

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