1. Pimpin A, Srituravanich W (2012) Review on micro- and nanolithography techniques and their applications. Eng J 16(1):37–55.
https://doi.org/10.4186/ej.2012.16.1.37
2. Thian SCH, Tang Y, Fuh JYH, Wong YS, Lu L, Loh HT (2006) Micro-rapid-prototyping via multi-layered photo-lithography. Int J Adv Manuf Technol 29(9):1026–1032.
https://doi.org/10.1007/s00170-005-2620-2
3. Debaes C, Vervaeke M, Volckaerts B, Van Erps J, Desmet L, Ottevaere H, Vynck P, Gomez V, Hermanne A, Thienpont H (2005) Low-cost micro-optical modules for board level optical interconnections. IEEE LEOS Newsletter 19:12–14
4. Thienpont H, Baukens V, Volckaerts B, Ottevaere H, Debaes C, Vervaeke M, Tuteleers P, Vynck P, Hermanne A, Hanney M, Brunfaut M, Van Campenhout JM, Veretennicoff I (2001) Free-space micro-optical modules: the missing link for photonic interconnects to silicon chips. Opto-Electron Rev 9(3):238–247
5. Zhang Y, Chen BK, Liu X, Sun Y (2010) Autonomous robotic pick-and-place of microobjects. IEEE Trans Robot 26(1):200–207