A laser scan technique for electronic materials surface evaluation-Reference-Cited by-同舟云学术

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A laser scan technique for electronic materials surface evaluation

Published:1974-02 Issue:1 Volume:3 Page:225-242
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:JEM

Author:

Oswald D. R.,Munro D. F.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/BF02654554.pdf

Reference12 articles.

1. ASTM Document F154 72T, “Tentative Recommended Practices and Nomenclature for Identification of Structures and Contaminants Seen in Specular Silicon Surfaces.

2. Hughes 3 mw He-Ne laser, Hughes Electron Dynamics Division, Torrance, California.

3. G-320 Optical Scanner, General Scanning Inc., Watertown, Massachusetts.

4. Carl Meyer f/1.5, 135 mm telephoto lens.

5. 01LPX 041 lens from Optical Industries, Santa Ana, California.

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical method for inspecting LSI patterns using reflected diffraction waves;Applied Optics;1988-03-15

2. Laser scanning microscopy;Proceedings of the IEEE;1982

3. Packaging;Semiconducting Devices;1976

4. Structure Analysis;Semiconducting Devices;1976

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